A simple set-up for in-situ observation of the critical dose of blistering during ion implantation in polymers

Abstract

A simple set-up was designed and fabricated for in-situ studies of the critical dose of blistering and changes on the surface morphology of the polymers during ion-implantation. Mylar, a very important polymer, stable at high temperatures, which shows severe blistering at dose level ∼- 7 × 1015, 250 keV H+ ions cm-2, was chosen for study with this set-up. The design of t some initial results are discussed here. Some major limitations are also described. © 1984.