Unusual thickness dependence of the dielectric constant of erbium oxide films

Abstract

The thickness dependence of the dielectric constant of Er2O3 films was studied. It was found that for films less than 700 Å thick and greater than 1300 Å the dielectric constant ε shows the usual behaviour of increasing with increasing thickness and then assuming the limiting bulk value. However, for films of intermediate thicknesses (700-1300 Å) the dielectric constant first decreases, attains a minimum value and then increases to obtain the bulk value. It is suggested, based on electron microscope observations, that this curious thickness dependence of ε arises because of the transformations from (i) amorphous to crystalline and (ii) f.c.c. type to b.c.c. type crystalline phases in the films. © 1976.